综述了TiAlN薄膜、TiAlN纳米多层膜、TiAlN纳米复合薄膜的研究进展, 主要介绍了3种薄膜的硬度、摩擦磨损等性能, 并对影响其性能的因素进行了分析, 提出了薄膜制备所存在的问题, 最后对其今后的发展做了展望。

所属栏目

综述山东省科技发展计划项目(2011GGX10321); 济南市科技发展计划项目(200906003)

收稿日期

2012/4/112013/1/20

作者单位

张海平:济南大学机械工程学院, 济南 250022
王守仁:济南大学机械工程学院, 济南 250022
郭培全:济南大学机械工程学院, 济南 250022

备注

张海平(1987-), 男, 山东淄博人, 硕士研究生。

引用该论文:

ZHANG Hai-ping,WANG Shou-ren,GUO Pei-quan.Research Progress of TiAlN-Based Thin Films[J].Materials for mechancial engineering,2013,37(4):1～5
张海平,王守仁,郭培全.TiAlN基薄膜的研究进展[J].机械工程材料,2013,37(4):1～5

被引情况:

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严汉兵,许剑光,吴海江,颜建辉,陈晓宇,陈肯, "铝对高温自蔓延合成Ti₃SiC₂粉体的影响",机械工程材料 39, 46-48(2015)
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