随着现代科学技术的不断进步, 普通硬质涂层和超硬涂层有了显著的发展, 部分涂层已经在某些领域实现了应用。主要介绍了氮化物、碳化物、氧化物、硼化物等普通硬质涂层和金刚石、类金刚石(DLC)、cBN、纳米多层结构涂层及纳米复合涂层等超硬涂层的性能、应用、制备技术及其发展趋势, 并对部分常见涂层面临的性能改进及其今后可能的发展方向进行了探讨。
所属栏目
综述山西省回国留学人员科研资助项目(2015-034, 2013-048)
收稿日期
2015/8/182016/3/21
作者单位
黑鸿君:太原理工大学表面工程研究所, 太原 030024
高洁:太原理工大学表面工程研究所, 太原 030024
贺志勇:太原理工大学表面工程研究所, 太原 030024
于盛旺:太原理工大学表面工程研究所, 太原 030024
唐宾:太原理工大学表面工程研究所, 太原 030024
备注
黑鸿君(1984-), 女, 回族, 山东聊城人, 讲师, 工学博士。
引用该论文:
HEI Hong-jun,GAO Jie,HE Zhi-yong,YU Sheng-wang,TANG Bin.Research Progress on Conventional Hard and Superhard Coatings[J].Materials for mechancial engineering,2016,40(5):1～15
黑鸿君,高洁,贺志勇,于盛旺,唐宾.普通硬质涂层和超硬涂层的研究进展[J].机械工程材料,2016,40(5):1～15
参考文献
【1】
顾卿赟, 姜世杭, 褚尧. 磁控溅射氮化铬和氮化钛薄膜的性能［J］. 电镀与涂饰, 2012, 30(12): 22-25.
【2】
LU F H, LO W Z. Degradation of ZrN films at high temperature under controlled atmosphere ［J］. Journal of Vacuum Science & Technology A, 2004, 22(5): 2071-2076.
【3】
GHOSH S K, KOHLER M S. Study of the relative wear and abrasion resistance of Ti(C, N)and coatings［J］. Surface and Coating Technology, 1992, 54/55(1/2/3): 466-469.
【4】
GISSLER W. Structure and properties of Ti-BN coatings［J］. Surface and Coatings Technology, 1994, 68: 556-563.
【5】
MATSUGI K, SASAKI G, YANAGISAWA O, et al. Preparation of Ti matrix composites of Ti-BCN systems by spark sintering and their friction and wear characteristics［J］. Materials Transactions, 2007, 48(5): 1042-1049.
【6】
SHTANSKY D V, LEVASHOV E A, SHEVEIKO A N, et al. The structure and properties of Ti-B-N, Ti-Si-B-N, Ti-Si-C-N and Ti-Al-C-N coatings deposited by magnetron sputtering using composite targets produced by self-propagating high-temperature synthesis (SHS)［J］. Journal of Materials Synthesis and Processing, 1998, 6(1): 61-72.
【7】
MAYRHOFER P H, HRLING A, KARLSSON L, et al. Self-organized nanostructures in the Ti-Al-N system［J］. Applied Physics Letters, 2003, 83(10): 2049-2051.
【8】
BOXMAN R L, ZHITOMIRSKY V N, GRIMBERG I, et al. Structure and hardness of vacuum arc deposited multi-component nitride coatings of Ti, Zr and Nb［J］. Surface and Coatings Technology, 2000, 125(1): 257-262.
【9】
ETTMAYER P, VENDL A, BANIK G, et al. Untersuchungen im system Cr-W-N［J］. Monatshefte für Chemie/Chemical Monthly, 1978, 109(4): 1005-1008.
【10】
朱朋建. Cr-Al-N, Cr-Mo-N 复合膜及 CrN/Mo2N 纳米多层膜的制备与性能研究［D］. 镇江: 江苏科技大学, 2011.
【11】
TAM P L, ZHOU Z F, SHUM P W, et al. Structural, mechanical, and tribological studies of Cr-Ti-Al-N coating with different chemical compositions［J］. Thin Solid Films, 2008, 516(16): 5725-5731.
【12】
SON M J, KANG S S, LEE E. Properties of TiBN coating on the tool steels by PECVD and its applications［J］. Journal of Materials Processing Technology, 2002, 130(4): 266-271.
【13】
吴大维. 硬质薄膜材料的最新发展及应用［J］. 真空, 2003 (6): 1-5.
【14】
MAN B Y, GUZMAN L, MIOTELLO A, et al. Microstructure, oxidation and H2-permeation resistance of TiAlN films deposited by DC magnetron sputtering technique［J］. Surface and Coatings Technology, 2004, 180: 9-14.
【15】
JUNG D H, MOON K I, SHIN S Y, et al. Influence of ternary elements (X=Si, B, Cr) on TiAlN coating deposited by magnetron sputtering process with single alloying targets［J］. Thin Solid Films, 2013, 546(6): 242-245.
【16】
DEHLINGER A, LAPOSTOLLE F, LAMY S, et al. Influence of Cr and Si addition on structural and mechanical properties of TiAlN coatings reactively sputter deposited［J］. Plasma Processes and Polymers, 2007, 4(S1): 588-592.
【17】
YU D, WANG C, CHENG X, et al. Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology［J］. Thin Solid Films, 2009, 517(17): 4950-4955.
【18】
赵时璐, 张钧, 刘常升.硬质合金表面多弧离子镀(Ti, Al, Zr, Cr)N多元氮化物膜［J］. 金属热处理, 2009 (9): 15-20.
【19】
崔贯英, 张钧, 吕会敏. 多弧离子镀 (Cr, Ti, Al, Zr) N 多组元超硬梯度膜的结构及性能［J］. 材料保护, 2010, 43(6): 24-27.
【20】
池成忠, 徐俊波, 陈良贤, 等. 非对称双极脉冲反应磁控溅射制备TiN/NbN多层膜［J］. 材料工程, 2012(7): 92-96.
【21】
赵时璐, 李友, 张钧, 等. 刀具氮化物涂层的研究进展［J］. 金属热处理, 2008(9): 99-104.
【22】
RZEPIEJEWSKA-MALYSKA K, PARLINSKA-WOJTAN M, WASMER K, et al. In-situ SEM indentation studies of the deformation mechanisms in TiN, CrN and TiN/CrN［J］. Micron, 2009, 40(1): 22-27.
【23】
靖爱. 液中脉冲放电制备TiC陶瓷涂层及其滑动磨损性能研究［D］.广州: 广东工业大学, 2005.
【24】
熊学辉, 傅强, 潘春旭. TiN/C3N4复合涂层的显微结构特征及其与性能的关系［J］. 机械工程材料, 2003, 27(5): 13-14.
【25】
吴守军, 桂单明. 碳化铬涂层T/P24在750 ℃空气中的抗氧化性能研究［J］.中国机械工程, 2013, 24(1): 99-103.
【26】
谢兆钱, 王海军, 郭永明, 等.高效能超音速等离子喷涂NiCr-Cr3C2涂层性能研究［J］.热加工工艺, 2011, 40(14): 110-112, 123.
【27】
杜聪, 吴秀玲, 王洪福, 等.等离子加工热锻模碳化物涂层的制备［J］.热加工工艺, 2013, 42(10): 136-139.
【28】
ZHU Y, YUKIMURA K, DING C, et al. Tribological properties of nanostructured and conventional WC-Co coatings deposited by plasma spraying［J］. Thin Solid Films, 2001, 388(1): 277-282.
【29】
李新梅, 李银锁, 憨勇. 钛表面阴极微弧电沉积制备氧化铝涂层［J］. 无机材料学报, 2005, 20(6): 1493-1499.
【30】
KOBAYASHI A. Formation of high hardness zirconia coatings by gas tunnel type plasma spraying［J］. Surface and Coatings Technology, 1997, 90(3): 197-202.
【31】
徐炫. Cr2O3纳米结构热喷涂粉末及耐磨涂层的制备研究［D］. 长沙: 中南大学, 2004.
【32】
ZHANG D, LI X, QIN B, et al. Fabrication of chromium (III) oxide (Cr2O3) coating by electrophoretic deposition［J］. Journal of the American Ceramic Society, 2014, 97(11): 3413-3417.
【33】
曾振欧, 肖正伟, 赵国鹏. 液相沉积法在304不锈钢上制备纳米二氧化钛涂层［J］. 电镀与涂饰, 2008, 27(2): 45-47.
【34】
BHUSHAN B. Structural and compositional characterization of RF sputter-deposited Ni-Cr+Cr2O3 films［J］. Journal of Lubrication Technology, 1981, 103(2): 211-217.
【35】
HONES P, LEVY F, RANDALL N X. Influence of deposition parameters on mechanical properties of sputter-deposited Cr2O3 thin films［J］. Journal of Materials Research, 1999, 14(9): 3623-3629.
【36】
SPROUL W D. New routes in the preparation of mechanically hard films［J］. Science, 1996, 273(5277): 889-892.
【37】
YASHAR P C, BARNETT S A, HULTMAN L, et al. Deposition and mechanical properties of polycrystalline Y2O3/ZrO2 superlattices［J］. Journal of Materials Research, 1999, 14(9): 3614-3622.
【38】
魏仑. 超硬含氧化物纳米多层膜的获得及研究［D］. 上海: 上海交通大学, 2005.
【39】
杨淑勤, 兰晓华, 黄宁康. NiCoCrAlY-ZrO2·Y2O3涂层在1 100 ℃不同时间的氧化行为［J］. 机械工程材料, 2007, 31(6): 6-8.
【40】
GUO S Q. Densification of ZrB2-based composites and their mechanical and physical properties: a review［J］. Journal of the European Ceramic Society, 2009, 29(6): 995-1011.
【41】
OPILA E, LEVINE S, LORINCZ J. Oxidation of ZrB2-and HfB2-based ultra-high temperature ceramics: effect of Ta additions［J］. Journal of Materials Science, 2004, 39(19): 5969-5977.
【42】
MAYRHOFER P H, MITTERER C, WEN J G, et al. Self-organized nanocolumnar structure in superhard TiB2 thin films［J］. Applied Physics Letters, 2005, 86: 1-3.
【43】
WHITTENBERGER J D, VISWANADHAM R K, MANNAN S K, et al. Elevated temperature slow plastic deformation of NiAl-TiB2 particulate composites at 1200 and 1300 K［J］. Journal of Materials Science, 1990, 25(1): 35-44.
【44】
ANDRIEVSKI R A. Nanostructured superhard films as typical nanomaterials［J］. Surface and Coatings Technology, 2007, 201(13): 6112-6116.
【45】
BUNDY F P, HALL H T, STRONG H M, et al. Man-made diamonds［J］. Nature, 1955, 176(4471): 51-55.
【46】
吕反修. 超硬材料涂层研究进展及应用［J］. 热处理, 2004, 19(4): 1-6.
【47】
于盛旺.高功率微波等离子体法高品质金刚石涂层沉积技术研究［D］. 北京: 北京科技大学, 2011.
【48】
AN K, YU S W, LI X J, et al. Microwave plasma reactor with conical-reflector for diamond deposition［J］. Vacuum, 2015, 117: 112-120.
【49】
AISENBERG S, CHABOT R. Ion-beam deposition of thin films of diamondlike carbon［J］. Journal of Applied Physics, 1971, 42(7): 2953-2958.
【50】
HUANG R F, CHAN C Y, LEE C H, et al. Wear-resistant multilayered diamond-like carbon coating prepared by pulse biased arc ion plating［J］. Diamond and Related Materials, 2001, 10(9): 1850-1854.
【51】
陈曦, 丁建宁, 李长生, 等. 超薄类金刚石膜纳米摩擦性能研究［J］. 机械工程材料, 2004, 28(2): 47-50.
【52】
JI L, LI H, ZHAO F, et al. Microstructure and mechanical properties of Mo/DLC nanocomposite films［J］. Diamond and Related Materials, 2008, 17(11): 1949-1954.
【53】
GAYATHRI S, KUMAR N, KRISHNAN R, et al. Tribological properties of pulsed laser deposited DLC/TM (TM= Cr, Ag, Ti and Ni) multilayers［J］. Tribology International, 2012, 53: 87-97.
【54】
NAKAZAWA H, KAMATA R, MIURA S, et al. Influence of duty ratio of pulsed bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition ［J］. Thin Solid Films, 2013, 539: 134-138.
【55】
DONNET C. Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review［J］. Surface and Coatings Technology, 1998, 100: 180-186.
【56】
郭军霞, 陈秋龙, 蔡珣, 等. DLC 多层膜对1Cr18Ni9Ti钢微动磨损性能的影响［J］. 机械工程材料, 2002, 26(8): 11-14.
【57】
DAMASCENO J C, CAMARGO S S, FREIRE F L, et al. Deposition of Si-DLC films with high hardness, low stress and high deposition rates［J］. Surface and Coatings Technology, 2000, 133: 247-252.
【58】
谭俊, 蔡志海, 张平, 等. 立方氮化硼涂层的制备与表征［J］. 中国表面工程, 2002(2): 16-20.
【59】
LI Y B, JIANG H X, YUAN G Z, et al. Electronic structure and impurity states of S-doped CBN: a first-principle study ［J］. Journal of Alloys and Compounds, 2012, 531: 82-85.
【60】
PALLAS A, LARSSON K. Effect by doping and surface termination on c-BN surface reactivity: a theoretical DFT approach ［J］. The Journal of Physical Chemistry C, 2014, 118(19): 10061-10075.
【61】
LEE S M, SEONG T Y, LEE W S, et al. Growth behavior of cubic boron nitride (cBN) phase in BCN film deposited on Si substrate with non-uniform ion flux［J］. Metals and Materials International, 2013, 19(3): 591-595.
【62】
MISHIMA O, TANAKA J, YAMAOKA S, et al. High-temperature cubic boron nitride p-N junction diode made at high pressure ［J］. Science, 1987, 238(4824): 181-183.
【63】
STEIN C, KEUNECKE M, BEWILOGUA K, et al. Cubic boron nitride based coating systems with different interlayers for cutting inserts［J］. Surface and Coatings Technology, 2011, 205: 103-106.
【64】
TETER D M, HEMLEY R J. Low-compressibility carbon nitrides ［J］. Science, 1996, 271(5245): 53-55.
【65】
SUNG C M, SUNG M. Carbon nitride and other speculative superhard materials ［J］. Materials Chemistry and Physics, 1996, 43(1): 1-18.
【66】
SCHVTZE A, BEWILOGUA K, LVTHJE H, et al. Improvement of the adhesion of sputtered cubic boron nitride films ［J］. Surface and Coatings Technology, 1997, 97(1): 33-38.
【67】
LIU A Y, COHEN M L. Prediction of new low compressibility solids［J］. Science, 1989, 245(4920): 841-842.
【68】
YAN S C, LI Z S, ZOU Z G. Photodegradation of rhodamine B and methyl orange over boron-doped g-C3N4 under visible light irradiation［J］. Langmuir, 2010, 26(6): 3894-3901.
【69】
WU F, LIU Y, YU G, et al. Visible-light-absorption in graphitic C3N4 bilayer: enhanced by interlayer coupling ［J］. The Journal of Physical Chemistry Letters, 2012, 3(22): 3330-3334.
【70】
WANG X, MAEDA K, THOMAS A, et al. A metal-free polymeric photocatalyst for hydrogen production from water under visible light ［J］. Nature Materials, 2008, 8(1): 76-80.
【71】
XU J, BRENNER T J K, CHEN Z, et al. Upconversion-agent induced improvement of g-C3N4 photocatalyst under visible light ［J］. ACS Applied Materials & Interfaces, 2014, 19(6): 16481-16486.
【72】
SU X W, SONG H W, CUI F Z, et al. Observations of laue pattern and stability of beta-C3N4 grains［J］. Journal of Physics: Condensed Matter, 1995, 40(7): 517-522.
【73】
HE X M, SHU L, LI W Z. Structure and properties of carbon nitride films synthesized by low energy ion bombardment［J］. Journal of Materials Research, 1997, 12(6): 1595-1602.
【74】
HAYASHI T, MATSUMURO A, MURAMATSU M, et al. Structural analysis of a carbon nitride film prepared by ion-beam-assisted deposition［J］. Japanese Journal of Applied Physics, 1999, 38(4): 395-397.
【75】
宋银, 侯明东, 王志光, 等. 氮化碳薄膜的制备及研究现状［J］. 高压物理学报, 2003, 17(4): 311-318.
【76】
XU J, MA T, LU W, et al. A new method for thin film deposition-faced microwave electron cyclotron resonance plasma sources enhanced direct-current magnetron sputtering［J］. Chinese Physics Letters, 2000, 17: 586-588.
【77】
IMAFUKU M, SASAJIMA Y, YAMAMOTO R, et al. Computer simulations of the structures of the metallic superlattices Au/Ni and Cu/Ni and their elastic moduli［J］. Journal of Physics F: Metal Physics, 1986, 16(7): 823-829.
【78】
VEPREK S, VEPREK-HEIJMAN M G J, KARVANKOVA P, et al. Different approaches to superhard coatings and nanocomposites ［J］. Thin Solid Films, 2005, 476(1): 1-29.
【79】
VEPREK S, ARGON A S. Mechanical properties of superhard nanocomposites ［J］. Surface and Coatings Technology, 2001, 146: 175-182.
