简要综述了等离子体氮化及物理气相沉积复合处理的新进展, 主要介绍了复合处理的工艺进展、复合处理镀层的组织结构、膜/基结合力、耐磨性和耐腐蚀性, 并对复合处理的应用前景进行了展望。
所属栏目
综述沈阳市科技计划资助项目(F10-239-6-00)
收稿日期
2011/6/172012/4/3
作者单位
赵彦辉:中国科学院金属研究所, 沈阳 110016
董利民:中国科学院金属研究所, 沈阳 110016
杜昊:中国科学院金属研究所, 沈阳 110016
于传跃:沈阳华俄科技发展有限公司, 沈阳 110164
肖金泉:中国科学院金属研究所, 沈阳 110016
于宝海:中国科学院金属研究所, 沈阳 110016
备注
赵彦辉(1973-), 男, 河北石家庄人, 助理研究员, 博士。
引用该论文:
ZHAO Yan-hui,DONG Li-min,DU Hao,YU Chuan-yue,XIAO Jin-quan,YU Bao-hai.Recent Research Progress of Plasma Nitriding and Physical Vapor Deposition Duplex Treatment[J].Materials for mechancial engineering,2012,36(6):1～4
赵彦辉,董利民,杜昊,于传跃,肖金泉,于宝海.等离子体氮化与物理气相沉积复合处理的研究进展[J].机械工程材料,2012,36(6):1～4
被引情况:
【1】
钟芳兴,陈雄清,许武波,华小珍,周贤良, "渗氮电压对液相等离子体电解渗氮层组织及耐腐蚀性能的影响",机械工程材料
40, 52-55(2016)
参考文献
【1】
KORHONEN A S, SIRVIO E H, SULONEN M S. Plasma nitriding and ion plating with an intensified glow discharge[J]. Thin Solid Films, 1983, 107: 387-394.
【2】
LUO Q, HOVSEPIAN P E, LEWIS D B, et al. Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels[J].Surface and Coatings Technology, 2005, 193: 39-45.
【3】
NAVINSEKA B, PANJANA P, URANKARA I, et al. Improvement of hot-working processes with PVD coatings and duplex treatment[J].Surface and Coatings Technology, 2001, 142/143: 1148-1154.
【4】
林松盛.镀层技术的结合[J].国外金属热处理, 2004, 25(5): 24-28.
【5】
DAMASCHEK R, STRYDOM I L, BERGMANN H W. Improved adhesion of TiN deposited on prenitrided steels[J].Instruments and Materials Surface Engineering, 1997, 2: 13-17.
【6】
徐冰仲, 葛建功.离子氮化及等离子体表面处理用脉冲电源及其应用[J].中国铁道科学, 1994, 15(4): 35-40.
【7】
郑辉.离子渗氮技术的进展[J].机械工人, 2007(9): 47-49.
【8】
LIEBERMAN M A, LICHTENBERG A J. Principles of plasma discharges and materials processing[C]// 2nd Edition Principles of Plasma Discharges and Materials Processing.New York: Wiley Interscience, 1994.
【9】
CZERWIEC T, MICHEL H, BERGMANN E. Low-pressure, high-density plasma nitriding: mechanisms, technology and results[J].Surface and Coatings Technology, 1998, 108/109: 182-190.
【10】
LI G Q, LIU C, LI J F, et al. Plasma-ion beam source enhanced deposition system[J].Surface and Coatings Technology, 2005, 193: 112-116.
【11】
SUN Y, BELL T. Plasma surface engineering of low alloy steel[J].Materials Science and Engineering A, 1991, 140: 419-434.
【12】
DINGREMONT N, PIANELLI A, BERGMANN E, et al. Analysis of the compatibility of plasma-nitrided steels with ceramic coatings deposited by the ion-plating technique[J].Surface and Coatings Technology, 1993, 61: 187-193.
【13】
许俊华, 顾明元, 李戈扬.等离子氮化与物理气相沉积TiN复合镀研究现状[J].机械工程材料, 1998, 22(6): 1-5.
【14】
STAPPEN M V, MALLIET B, STALS L, et al. Charaterization of TiN coatings deposited on plasma-nitrided tool surfaces[J].Materials Science and Engineering A, 1991, 140: 554-562.
【15】
HAEN J D, QUAEYHAGENS C. An interface study of various PVD TiN coatings on plasma-nitrided austenitic stainless steel AISI 304[J].Surface and Coatings Technology, 1993, 61: 468-473.
【16】
QUAEYHAGENS C, STAPPEN M V. Interface study of physically vapour-deposited TiN coatings on plasma-nitrided tool steel surfaces with Auger electron spectroscopy, resonant nuclear reaction analysis and Rutherford backscattering spectroscopy[J].Surface and Coatings Technology, 1992, 54/55: 279-286.
【17】
TILLMANN W, VOGLI E, MOMENI S. Mechanical and tribological properties of Ti/TiN duplex coatings on high and low alloy tool steels[J].Vacuum, 2010, 84: 387-392.
【18】
BATISTA J C A, GODOY C, MATTHEWS A. Micro-scale abrasive wear testing of duplex and non-duplex (single-layered) PVD (Ti, Al)N, TiN and Cr-N coatings[J].Tribology International, 2002, 35: 363-372.
【19】
李晖, 许洪斌, 张津, 等.32Cr2MoV钢氮化后离子镀TiN的摩擦磨损研究[J].热加工工艺, 2005(2): 32-33.
【20】
HUANG H H, HE J L, HON M H, et al. Microstructure and mechanical properties of surface layer obtained by plasma nitriding and/or TiN coating on high speed steel[J].Surface and Coatings Technology, 1994, 64: 41-46.
【21】
CHEN C Z, LI Q, LENG Y X, et al. Improved hardness and corrosion resistance of iron by Ti/TiN multilayer coating and plasma nitriding duplex treatment[J].Surface and Coatings Technology, 2010, 204: 3082-3086.
【22】
LISCANO S, GIL L, LEN O A, et al. Corrosion performance of duplex treatments based on plasma nitriding and PAPVD TiAlN coating[J].Surface and Coatings Technology, 2006, 201: 4419-4423.
